Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10727088 | Plasma processing apparatus and plasma processing method | Michikazu Morimoto, Yuuzou Oohirabaru, Tetsuo Ono | 2020-07-28 |
| 10559481 | Plasma processing apparatus and plasma processing method | Michikazu Morimoto, Yuuzou Oohirabaru, Tetsuo Ono | 2020-02-11 |