Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10727088 | Plasma processing apparatus and plasma processing method | Michikazu Morimoto, Yasuo Ohgoshi, Yuuzou Oohirabaru | 2020-07-28 |
| 10600619 | Plasma processing apparatus | Yoshiharu Inoue, Michikazu Morimoto, Masaki Fujii, Masakazu Miyaji | 2020-03-24 |
| 10559481 | Plasma processing apparatus and plasma processing method | Michikazu Morimoto, Yasuo Ohgoshi, Yuuzou Oohirabaru | 2020-02-11 |