Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770338 | System comprising a single wafer, reduced volume process chamber | Dirk Noack | 2020-09-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770338 | System comprising a single wafer, reduced volume process chamber | Dirk Noack | 2020-09-08 |