Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770338 | System comprising a single wafer, reduced volume process chamber | Wieland Pethe | 2020-09-08 |
DN
Dirk Noack
Overall (2020): #490,098 of 565,922Top 90%
1
Patents 2020