Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10629414 | Target supply device, target material refining method, recording medium having target material refining program recorded therein, and target generator | Fumio Iwamoto, Tsukasa HORI, Osamu Wakabayashi | 2020-04-21 |