Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10629414 | Target supply device, target material refining method, recording medium having target material refining program recorded therein, and target generator | Fumio Iwamoto, Yutaka Shiraishi, Osamu Wakabayashi | 2020-04-21 |
| 10631393 | Chamber device and extreme ultraviolet light generating device | — | 2020-04-21 |