Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10667376 | Target supply device, extreme ultraviolet light generation device, and target supply method | Yuta Takashima | 2020-05-26 |
| 10609803 | Extreme ultraviolet (EUV) light generating apparatus and control method for centroid of EUV light | Yuichi Nishimura, Takayuki Yabu | 2020-03-31 |