Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10869378 | Target measuring apparatus and extreme ultraviolet light generation apparatus | — | 2020-12-15 |
| 10842010 | Extreme ultraviolet light generation system | Osamu Wakabayashi | 2020-11-17 |
| 10609803 | Extreme ultraviolet (EUV) light generating apparatus and control method for centroid of EUV light | Yuichi Nishimura, Yoshifumi Ueno | 2020-03-31 |
| 10531550 | Extreme ultraviolet light generation device | — | 2020-01-07 |
| 10531551 | Extreme ultraviolet light generating apparatus | Yuichi Nishimura | 2020-01-07 |