Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10674590 | Tank, target generation device, and extreme-UV-light generation device | Toshihiro Nishisaka | 2020-06-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10674590 | Tank, target generation device, and extreme-UV-light generation device | Toshihiro Nishisaka | 2020-06-02 |