Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10698316 | Target generation device replacement trolley, target generation device replacement system, and target generation device replacement method | — | 2020-06-30 |
| 10674590 | Tank, target generation device, and extreme-UV-light generation device | Toshiyuki Hirashita | 2020-06-02 |