Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10640679 | CMP compositions selective for oxide and nitride with improved dishing and pattern selectivity | Sudeep Pallikkara Kuttiatoor, Kevin P. Dockery | 2020-05-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10640679 | CMP compositions selective for oxide and nitride with improved dishing and pattern selectivity | Sudeep Pallikkara Kuttiatoor, Kevin P. Dockery | 2020-05-05 |