Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10676647 | Composition for tungsten CMP | Na Zhang, Zhao Ting Liu, Roman A. Ivanov | 2020-06-09 |
| 10647887 | Tungsten buff polishing compositions with improved topography | Pankaj Kumar Singh, Steven Grumbine, Kim Marie Long | 2020-05-12 |
| 10640679 | CMP compositions selective for oxide and nitride with improved dishing and pattern selectivity | Sudeep Pallikkara Kuttiatoor, Charles Hamilton | 2020-05-05 |