Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10802399 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Ryo Nishio, Masafumi KOJIMA, Akiyoshi GOTO, Michihiro SHIRAKAWA, Keita Kato | 2020-10-13 |