Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10551739 | Resist composition, and resist film, pattern forming method, and method for manufacturing electronic device, each using resist composition | Akira Takada, Naoya SHIMOJU, Toshiya Takahashi, Hidehiro Mochizuki | 2020-02-04 |
| 10545405 | Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, mask blank including actinic ray-sensitive or radiation-sensitive film, pattern forming method, and method for manufacturing electronic device | Shuhei Yamaguchi, Koutarou Takahashi, Toshiaki Fukuhara | 2020-01-28 |