Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859914 | Pattern forming method, method for producing electronic device, and actinic ray-sensitive or radiation-sensitive resin composition for organic solvent development | Naoya HATAKEYAMA, Akiyoshi GOTO, Michihiro SHIRAKAWA, Keita Kato | 2020-12-08 |
| 10649329 | Active light sensitive or radiation sensitive resin composition, active light sensitive or radiation sensitive film, pattern forming method, method for manufacturing electronic device, and electronic device | Shohei Kataoka, Akinori Shibuya | 2020-05-12 |