Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10670960 | Enhanced high aspect ratio etch performance using accelerated neutral beams derived from gas-cluster ion beams | Sean R. Kirkpatrick, Kiet A. Chau | 2020-06-02 |
| 10539867 | Film and methods of forming same | Sean R. Kirkpatrick | 2020-01-21 |