Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10858732 | Method for neutral beam processing based on gas cluster ion beam technology and articles produced thereby | Allen R. Kirkpatrick, Michael J. Walsh | 2020-12-08 |
| 10825685 | Method for neutral beam processing based on gas cluster ion beam technology and articles produced thereby | Allen R. Kirkpatrick, Michael J. Walsh, Richard C. Svrluga | 2020-11-03 |
| 10670960 | Enhanced high aspect ratio etch performance using accelerated neutral beams derived from gas-cluster ion beams | Kiet A. Chau, Son T. Chau | 2020-06-02 |
| 10627352 | Methods and apparatus for employing an accelerated neutral beam for improved surface analysis | Allen R. Kirkpatrick | 2020-04-21 |
| 10556042 | Drug delivery system and method of manufacturing thereof | Richard C. Svrluga, Stephen M. Blinn | 2020-02-11 |
| 10539867 | Film and methods of forming same | Son T. Chau | 2020-01-21 |