Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10824135 | Scheduler, substrate processing apparatus, and substrate conveyance method | Koji Nonobe, Takashi Mitsuya, Kunio Oishi | 2020-11-03 |
| 10824138 | Scheduler, substrate processing apparatus, and substrate conveyance method | Koji Nonobe, Takashi Mitsuya, Kunio Oishi | 2020-11-03 |
| 10818527 | Substrate holding member, substrate processing device, method for controlling substrate processing device, and storage medium storing programs | — | 2020-10-27 |
| 10648099 | Plating method and plating apparatus | Masashi Shimoyama, Mizuki Nagai | 2020-05-12 |