Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10824135 | Scheduler, substrate processing apparatus, and substrate conveyance method | Takashi Mitsuya, Ryuya Koizumi, Kunio Oishi | 2020-11-03 |
| 10824138 | Scheduler, substrate processing apparatus, and substrate conveyance method | Takashi Mitsuya, Ryuya Koizumi, Kunio Oishi | 2020-11-03 |