Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10833471 | Lithography system bandwidth control | — | 2020-11-10 |
| 10727642 | Online calibration for repetition rate dependent performance variables | Joshua Jon Thornes, Kevin M. O'Brien, Frank Everts, Herman Philip Godfried, Russell Allen Burdt | 2020-07-28 |
| 10627724 | Lithographic apparatus and method | Frank Everts, Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Herman Philip Godfried, Joshua Jon Thornes, Kevin M. O'Brien +1 more | 2020-04-21 |