Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10727642 | Online calibration for repetition rate dependent performance variables | Tanuj Aggarwal, Kevin M. O'Brien, Frank Everts, Herman Philip Godfried, Russell Allen Burdt | 2020-07-28 |
| 10627724 | Lithographic apparatus and method | Frank Everts, Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Herman Philip Godfried, Kevin M. O'Brien, Leon Pieter Paul Saanen +1 more | 2020-04-21 |