Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10552569 | Method for calculating non-correctable EUV blank flatness for blank dispositioning | Christina A. Turley, Jed H. Rankin, Allen H. Gabor, Timothy A. Brunner | 2020-02-04 |