Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10578976 | Catadioptric projection objective including a reflective optical component and a measuring device | Toralf Gruner, Christoph Zaczek, Ralf Mueller | 2020-03-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10578976 | Catadioptric projection objective including a reflective optical component and a measuring device | Toralf Gruner, Christoph Zaczek, Ralf Mueller | 2020-03-03 |