Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10656400 | Imaging optical unit and projection exposure unit including same | — | 2020-05-19 |
| 10558026 | Projection optical unit for imaging an object field into an image field, and projection exposure apparatus comprising such a projection optical unit | — | 2020-02-11 |
| 10545323 | Projection optical unit for EUV projection lithography | Hartmut Enkisch, Thomas Schicketanz | 2020-01-28 |
| 10527832 | Imaging optical unit and projection exposure apparatus including same | Hans-Juergen Rostalski | 2020-01-07 |