Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10670955 | Critical dimension variation correction in extreme ultraviolet lithography | Sergey Oshemkov, Vladimir Kruglyakov, Yuval Perets | 2020-06-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10670955 | Critical dimension variation correction in extreme ultraviolet lithography | Sergey Oshemkov, Vladimir Kruglyakov, Yuval Perets | 2020-06-02 |