Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10852642 | Control apparatus and method for controlling a manipulator in respect of a microlithographic projection exposure apparatus | Bjoern Butscher | 2020-12-01 |
| 10845274 | Device having a micro fluid actuator | Martin Richter, Yuecel Congar | 2020-11-24 |
| 10792430 | Free-jet dosing system for applying a fluid into or under the skin | Martin Richter, Martin Wackerle | 2020-10-06 |