Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10852642 | Control apparatus and method for controlling a manipulator in respect of a microlithographic projection exposure apparatus | Christian Wald | 2020-12-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10852642 | Control apparatus and method for controlling a manipulator in respect of a microlithographic projection exposure apparatus | Christian Wald | 2020-12-01 |