Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879040 | Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly | Naoyuki Okamoto, Masashi Tsujiyama, Fumihito Suzuki | 2020-12-29 |
| 10615012 | Sputtering apparatus and substrate processing apparatus | Shigenori Ishihara, Hiroyuki Toya, Toshikazu Nakazawa, Eiji Nakamura, Shintaro Suda +2 more | 2020-04-07 |