Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10615012 | Sputtering apparatus and substrate processing apparatus | Hiroyuki Toya, Yasushi Yasumatsu, Toshikazu Nakazawa, Eiji Nakamura, Shintaro Suda +2 more | 2020-04-07 |
SI
Shigenori Ishihara
Overall (2020): #276,667 of 565,922Top 50%
1
Patents 2020