Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10677588 | Localized telecentricity and focus optimization for overlay metrology | Andrew V. Hill, Ohad Bachar, Avi Abramov, Yuri Paskover | 2020-06-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10677588 | Localized telecentricity and focus optimization for overlay metrology | Andrew V. Hill, Ohad Bachar, Avi Abramov, Yuri Paskover | 2020-06-09 |