Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879866 | Filter circuit, heating circuit, and semiconductor processing apparatus | Gang Wei, Haitao Yu | 2020-12-29 |
| 10699881 | Impedance matching system, impedance matching method, and semiconductor processing apparatus thereof | Jing Wei, Xingcun Li, Gang Wei | 2020-06-30 |
| 10643822 | Impedance matching method and device for pulsed radio frequency power supply | — | 2020-05-05 |