Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879866 | Filter circuit, heating circuit, and semiconductor processing apparatus | Xiaoyang Cheng, Haitao Yu | 2020-12-29 |
| 10854482 | Reaction chamber and plasma processing apparatus | Xingcun Li, Dongsan Li, Changle Guan, Mingda Qiu, Longchao Zhao +1 more | 2020-12-01 |
| 10699881 | Impedance matching system, impedance matching method, and semiconductor processing apparatus thereof | Jing Wei, Xiaoyang Cheng, Xingcun Li | 2020-06-30 |