Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854434 | Magnetron, magnetron sputtering chamber, and magnetron sputtering apparatus | Yujie Yang | 2020-12-01 |
| 10622145 | Magnetic thin film deposition chamber and thin film deposition apparatus | Yujie Yang, Wei Xia, Peijun Ding, Hougong Wang | 2020-04-14 |