Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10622145 | Magnetic thin film deposition chamber and thin film deposition apparatus | Yujie Yang, Tongwen Zhang, Wei Xia, Hougong Wang | 2020-04-14 |
| 10622224 | Precleaning chamber and plasma processing apparatus | Qing SHE, Peng-Yang Chen, Mengxin Zhao, Kui Xu, Guodong Bian | 2020-04-14 |