Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10822225 | MEMS sensors with selectively adjusted damping of suspension | Mikulas Jandak, Ulrich Schmid | 2020-11-03 |
| 10753744 | MEMS out of plane actuator | Mikulas Jandak, Tomas Neuzil, Hana Krausova, Ulrich Schmid | 2020-08-25 |
| 10710874 | Micromechanical structure and method for manufacturing the same | Tobias Frischmuth, Guenter Denifl, Thomas Grille, Ursula Hedenig, Markus Kahn +2 more | 2020-07-14 |
| 10684163 | Acoustic wave sensor | Alfons Dehe, Manuel Dorfmeister, Ulrich Schmid | 2020-06-16 |
| 10582304 | Diaphragm element arrangement and related method | Alfons Dehe, Manuel Dorfmeister, Ulrich Schmid | 2020-03-03 |