TT

Teng-Chao David Tao

AT Axcelis Technologies: 1 patents #10 of 30Top 35%
📍 Saugus, MA: #7 of 17 inventorsTop 45%
🗺 Massachusetts: #5,137 of 14,474 inventorsTop 40%
Overall (2020): #250,294 of 565,922Top 45%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10580616 System and method for in-situ beamline film stabilization or removal in the AEF region David A. Kirkwood 2020-03-03