DK

David A. Kirkwood

AT Axcelis Technologies: 2 patents #4 of 30Top 15%
📍 Arlington, MA: #100 of 452 inventorsTop 25%
🗺 Massachusetts: #2,611 of 14,474 inventorsTop 20%
Overall (2020): #181,332 of 565,922Top 35%
2
Patents 2020

Issued Patents 2020

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10689752 Film stabilization through novel materials modification of beamline components Joseph Valinski 2020-06-23
10580616 System and method for in-situ beamline film stabilization or removal in the AEF region Teng-Chao David Tao 2020-03-03