Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10748806 | Apparatus and system for preventing backside peeling defects on semiconductor wafers | Yen-Yu Chen, Wei-Jen Chen, Tsang-Yang Liu, Chang-Sheng Lee, Wei-Chen Liao +1 more | 2020-08-18 |