Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10832929 | Wafer-like substrate processing method and apparatus | Ralph Rauenbusch, Tobias Bussenius, Daniel Buchberger | 2020-11-10 |
| 10604861 | Device for vertical galvanic metal deposition on a substrate | — | 2020-03-31 |