Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10832929 | Wafer-like substrate processing method and apparatus | Tobias Bussenius, Daniel Buchberger, Ray Weinhold | 2020-11-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10832929 | Wafer-like substrate processing method and apparatus | Tobias Bussenius, Daniel Buchberger, Ray Weinhold | 2020-11-10 |