Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10816907 | Method for determining an optimized set of measurement locations for measurement of a parameter of a lithographic process, metrology system and computer program products for implementing such methods | Christiaan Theodoor De Ruiter | 2020-10-27 |
| 10746668 | Methods and apparatus for measuring a property of a substrate | Wouter Lodewijk Elings, Franciscus Bernardus Maria Van Bilsen, Christianus Gerardus Maria De Mol, Everhardus Cornelis Mos, Hoite Pieter Theodoor Tolsma +5 more | 2020-08-18 |
| 10719011 | Method and apparatus to correct for patterning process error | Daan Maurits Slotboom, Richard Johannes Franciscus Van Haren, Peter Hanzen Wardenier | 2020-07-21 |
| 10691863 | Method and apparatus to correct for patterning process error | Everhardus Cornelis Mos, Richard Johannes Franciscus Van Haren, Peter Hanzen Wardenier, Erik Weber Jensen | 2020-06-23 |