Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10681796 | Target trajectory metrology in an extreme ultraviolet light source | Michael Leslie Price, Mark Joseph Mitry | 2020-06-09 |
| 10681797 | Target trajectory metrology in an extreme ultraviolet light source | Michael Leslie Price, Mark Joseph Mitry | 2020-06-09 |
| 10663866 | Wavelength-based optical filtering | Alexander Anthony Schafgans, Igor V. Fomenkov, Yezheng Tao, Rostislav Rokitski, Robert Jay Rafac +1 more | 2020-05-26 |
| 10606096 | Reducing an optical power of a reflected light beam | Philip M. Conklin | 2020-03-31 |