Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10674591 | Target expansion rate control in an extreme ultraviolet light source | Daniel Jason Riggs | 2020-06-02 |
| 10663866 | Wavelength-based optical filtering | Alexander Anthony Schafgans, Igor V. Fomenkov, Yezheng Tao, Rostislav Rokitski, Daniel John William Brown +1 more | 2020-05-26 |
| 10667377 | Extreme ultraviolet light source | Richard L. Sandstrom, Daniel John William Brown, Kai-Chung Hou | 2020-05-26 |