Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10876218 | Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method | Jong Won Shon, Seung Woo Choi, Dong Seok Kang | 2020-12-29 |
| 10847529 | Substrate processing method and device manufactured by the same | Tae Hee Yoo, Yoon Ki Min | 2020-11-24 |
| 10644025 | Method of processing a substrate and a device manufactured by using the method | Seung Ju Chun, Jong Wan Choi, Young Jae Kim, Sun Ja Kim, Wan Gyu Lim +3 more | 2020-05-05 |
| 10622375 | Method of processing a substrate and a device manufactured by using the method | Seung Ju Chun, Jong Wan Choi, Young Jae Kim, Sun Ja Kim, Wan Gyu Lim +3 more | 2020-04-14 |