Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10876218 | Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method | Yong Min Yoo, Seung Woo Choi, Dong Seok Kang | 2020-12-29 |
| 10738381 | Thin film deposition apparatus | Hyun Soo Jang, Jeong Ho Lee, Woo Chan Kim, Sung Hoon Jun | 2020-08-11 |