Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847365 | Method of forming conformal silicon carbide film by cyclic CVD | Atsuki Fukazawa | 2020-11-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847365 | Method of forming conformal silicon carbide film by cyclic CVD | Atsuki Fukazawa | 2020-11-24 |