Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10546732 | Sputter deposition source, apparatus for sputter deposition and method of assembling thereof | Stefan Keller, Dieter Haas, Stefan Bangert | 2020-01-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10546732 | Sputter deposition source, apparatus for sputter deposition and method of assembling thereof | Stefan Keller, Dieter Haas, Stefan Bangert | 2020-01-28 |