Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10837111 | Holding arrangement for supporting a substrate carrier and a mask carrier during layer deposition in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a substrate carrier supporting a substrate and a mask carrier | Tommaso Vercesi, Stefan Bangert, Oliver Heimel, Daniele GISLON | 2020-11-17 |
| 10546732 | Sputter deposition source, apparatus for sputter deposition and method of assembling thereof | Stefan Keller, Uwe SCHÜßLER, Stefan Bangert | 2020-01-28 |