Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770321 | Process kit erosion and service life prediction | Kang-Lie Chiang, Greg Blackburn, Pallavi Zhang, Michael D. Armacost | 2020-09-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770321 | Process kit erosion and service life prediction | Kang-Lie Chiang, Greg Blackburn, Pallavi Zhang, Michael D. Armacost | 2020-09-08 |