Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770321 | Process kit erosion and service life prediction | Kang-Lie Chiang, Greg Blackburn, Pallavi Zhang, Nitin Khurana | 2020-09-08 |
| 10541169 | Method and system for balancing the electrostatic chucking force on a substrate | Chong Jiang, Lei Jing, Mingte Liu, Adolph Miller Allen, Michael W. Johnson +1 more | 2020-01-21 |